Title :
Role of System Dynamics in Semiconductor Fabrication
Author_Institution :
Intel Corporation, Leaders for Manufacturing Fellow, Massachusetts Institute of Technology
Keywords :
Delay; Fabrication; Feedback loop; Lead compounds; Power system modeling; Production facilities; Pulp manufacturing; Semiconductor device manufacture; Technology management; Virtual manufacturing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682476
