Resonant grating filter for a MEMS based add-drop device at oblique incidence

Author

Niederer, G. ; Salt, M. ; Herzig, H.P. ; Overstolz, T. ; Noell, W. ; de Rooij, N.F.

Author_Institution

Inst. of Microtechnology, Neuchatel Univ., Switzerland

fYear

2002

fDate

20-23 Aug. 2002

Firstpage

99

Lastpage

100

Abstract

A reflective tunable resonant grating filter with a full width at half maximum (FWHM) of 0.5 nm at 1545 nm for TE polarization was investigated. The tunability is achieved by placing the filter on a tiltable MEMS platform. The filter was designed to accommodate fabrication tolerances and since we work in microsystems the minimum filter size was analyzed, as well as the needed tilt angle for the platform. The device works at 45/spl deg/ incidence angle, thus a separation of the reflected and incident light is easily possible.

Keywords

diffraction gratings; light polarisation; micro-optics; optical communication equipment; optical filters; optical resonators; 1545 nm; FWHM; MEMS based add-drop device; TE polarization; fabrication tolerances; guided-mode resonance; incidence angle; oblique incidence; resonant grating filter; telecom applications; tilt angle; tiltable MEMS platform; waveguide gratings; Bandwidth; Diffraction; Equations; Filters; Gratings; Micromechanical devices; Polarization; Reflection; Resonance; Tellurium;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on

Conference_Location

Lugano, Switzerland

Print_ISBN

0-7803-7595-5

Type

conf

DOI

10.1109/OMEMS.2002.1031462

Filename

1031462