DocumentCode :
2231549
Title :
Polymeric optical components for sensors based on moulding techniques
Author :
Gindele, F. ; Novotny, C. ; Koch, A. ; Kunz, S. ; Kufner, S.
Author_Institution :
Inst. of Microtechnology Mainz, Germany
fYear :
2002
fDate :
20-23 Aug. 2002
Firstpage :
101
Lastpage :
102
Abstract :
In this paper we present a fabrication technique for monolithically integrated polymer-based optical sensors built up with diffractive and refractive optical components by injection moulding. Mould inserts, e.g. a toroidal optical mirror with an average surface roughness of R/sub a/<20 nm and a radial shape accuracy as high as 0.2% (0.1 mm) and optical gratings for the visible (VIS) and near infrared (NIR) spectral range with a planarity of /spl plusmn/4 /spl mu/m/cm and an absolute diffraction efficiency as high as /spl eta/=80%, can be realised by ultra-precision machining and electro-forming. All optical elements have been replicated in polycarbonate (PC) with comparable characteristics.
Keywords :
diffraction gratings; diffractive optical elements; integrated optics; mirrors; moulding; optical fabrication; optical polymers; optical sensors; 80 percent; diffraction efficiency; diffractive optical component; electroforming; fabrication technique; injection moulding; monolithic integration; optical grating; polycarbonate; polymeric optical sensor; refractive optical component; toroidal optical mirror; ultra-precision machining; Injection molding; Mirrors; Optical device fabrication; Optical devices; Optical diffraction; Optical polymers; Optical refraction; Optical sensors; Rough surfaces; Surface roughness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
Type :
conf
DOI :
10.1109/OMEMS.2002.1031463
Filename :
1031463
Link To Document :
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