• DocumentCode
    2231612
  • Title

    Future Technological and Economic Prospects for VLSI

  • Author

    Komiya, Hiroyoshi

  • Author_Institution
    ULSI Laboratory, Mitsubishi Electric Corp., Japan
  • fYear
    1993
  • fDate
    18-19 Oct 1993
  • Firstpage
    76
  • Lastpage
    76
  • Keywords
    Costs; Electronics industry; Investments; Laboratories; Production equipment; Research and development; Semiconductor device manufacture; System-on-a-chip; Ultra large scale integration; Very large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
  • Type

    conf

  • DOI
    10.1109/ASMC.1993.682481
  • Filename
    682481
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2231612