Title :
Future Technological and Economic Prospects for VLSI
Author :
Komiya, Hiroyoshi
Author_Institution :
ULSI Laboratory, Mitsubishi Electric Corp., Japan
Keywords :
Costs; Electronics industry; Investments; Laboratories; Production equipment; Research and development; Semiconductor device manufacture; System-on-a-chip; Ultra large scale integration; Very large scale integration;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682481
