Title :
Research Directions for VLSI at Minimum Capital Cost
Author_Institution :
GRESSI, CNET chemin du Vieux Chene, France
Keywords :
Costs; Investments; Manufacturing; Research and development; Semiconductor device manufacture; Semiconductor materials; Very large scale integration;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682482
