Title :
The Deployment of TPM in the First 8" Wafer Pilot Line in Taiwan
Author :
Liu, D. ; Yang, J.M. ; Lin, J.Y. ; Tseng, H.P.
Author_Institution :
ERSO/ITRI, Taiwan
Keywords :
Chemical vapor deposition; Computer integrated manufacturing; Databases; Etching; Furnaces; Implants; Management training; Production; Pulp manufacturing; Semiconductor device manufacture;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682483
