DocumentCode
2231708
Title
Comparative Optical Techniques for Monitoring Metals in Single-Crystal Silicon
Author
Wenner, Valerie ; Lowell, John
Author_Institution
Advanced Micro Devices, Austin, TX
fYear
1993
fDate
18-19 Oct 1993
Firstpage
79
Lastpage
82
Keywords
CMOS technology; Charge carrier lifetime; Contamination; Iron; Manufacturing; Mass spectroscopy; Monitoring; Photonic band gap; Pollution measurement; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
Type
conf
DOI
10.1109/ASMC.1993.682484
Filename
682484
Link To Document