A micromachined 2/spl times/2 optical switch aligned with beveled fibers for low return loss

Author

Ho Nam Kwon ; Sung Sik Yun ; Won Hyo Kim ; Young Yun Kim ; Jong Hyun Lee

Author_Institution

Dept. of Mechatronics, K-JIST, Gwangju, South Korea

fYear

2002

fDate

20-23 Aug. 2002

Firstpage

115

Lastpage

116

Abstract

In an optical wavelength division multiplexed (WDM) telecommunication system, optical add-drop multiplexers (OADM) with optical switches have been researched to change the paths of the signals. This paper reports on the design and characterization of a micromachined 2×2 optical switch aligned with 4 beveled fibers for low return loss in an optical add-drop application. For driving the micro mirror to change the optical paths an electrostatic comb actuator is used. The experimental return losses and polarization dependent loss were -43 and 0.05 dB, respectively.

Keywords

electrostatic actuators; micromachining; micromirrors; multiplexing equipment; optical communication equipment; optical fabrication; optical fibres; optical losses; optical switches; silicon-on-insulator; sputter etching; wavelength division multiplexing; -43 dB; 0.05 dB; MOEMS; SOI wafers; Si; beveled fibers; deep RIE process; deep reactive ion etching process; electrostatic comb actuator; fabrication; low return loss; micro mirror; micromachined optical switch; optical WDM system; optical add-drop multiplexers; optical characterization; optical wavelength division multiplexed system; polarization dependent loss; Insertion loss; Mirrors; Optical design; Optical fiber losses; Optical fiber polarization; Optical films; Optical losses; Optical refraction; Optical switches; Optical variables control;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on

Conference_Location

Lugano, Switzerland

Print_ISBN

0-7803-7595-5

Type

conf

DOI

10.1109/OMEMS.2002.1031470

Filename

1031470