Title :
Use of goal modeling and reliability engineering tools to accelerate availability improvement in new equipment development
Author :
King, A.J. ; Rojhantalab, H. ; Troness, D.A.
Author_Institution :
Intel Corp., Santa Clara, CA, USA
Abstract :
The challenge to improve capital equipment productivity in the semiconductor industry is made more acute for leading edge manufactures by the need to quickly bring new technologies on line and into cost-effective production. This paper describes the use of specific tools used to improve equipment availability in a process equipment development program at Intel. An availability model was developed to set goals and prioritize efforts. Using a set of known reliability tools, root cause solutions were found twice as fast as when no such tools were used. A practical guide to using these tools and integrating them into existing management structures is proposed
Keywords :
integrated circuit manufacture; production; reliability theory; semiconductor device manufacture; Intel; availability improvement; availability model; capital equipment productivity; cost-effective production; goal modeling; management structures; new equipment development; process equipment development program; reliability engineering tools; semiconductor industry; Acceleration; Availability; Cost function; Equations; Preventive maintenance; Production; Reliability engineering; Semiconductor device manufacture; Semiconductor device modeling; Virtual manufacturing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1996. ASMC 96 Proceedings. IEEE/SEMI 1996
Conference_Location :
Cambridge, MA
Print_ISBN :
0-7803-3371-3
DOI :
10.1109/ASMC.1996.557969
