Title :
An optical switch with newly designed electrostatic actuators for optical cross connects
Author :
Yongseop Yoon ; Kideok Bae ; Jinhwan Kim ; Hyung Choi
Author_Institution :
MEMS Lab., Samsung Adv. Inst. of Technol., Kyungki, South Korea
Abstract :
We have developed an optical switch having low voltage driven electrostatic actuators and measured its optical performance. The simple structure of the actuator makes the fabrication process easy, helping to yield a low-cost device. In addition, a low-voltage actuating mechanism also provides good compatibility with IC and a simple driving circuit.
Keywords :
electrostatic actuators; micromachining; micromirrors; optical arrays; optical fabrication; optical switches; planarisation; LV driven electrostatic actuators; MOEMS; driving circuit; fabrication process; low-cost device; low-voltage actuating mechanism; micromirror array design; optical cross connects; optical performance; optical switch; planarization method; Electrodes; Electrostatic actuators; Insertion loss; Micromechanical devices; Mirrors; Optical design; Optical losses; Optical switches; Springs; Voltage;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031473
