Title :
Digital holography for characterization and testing of MEMS structures
Author :
Ferraro, P. ; Coppola, G. ; De Nicola, S. ; Finizio, A. ; Grilli, S. ; Iodice, M. ; Magro, C. ; Pierattini, G.
Author_Institution :
Ist. per la Microelettronica e i Microsistemi, CNR, Napoli, Italy
Abstract :
Digital holography is proposed as a non-contact method for the inspection and characterization of MEMS. The method can be useful for assessing the fabrication process and the functionality as well as the reliability of micromachined structures.
Keywords :
holographic interferometry; inspection; micromechanical devices; testing; MEMS characterization; MEMS inspection; MEMS structures reliability; digital holography; fabrication process assessment; micromachined structures; noncontact method; DH-HEMTs; Fabrication; Holography; Image reconstruction; Inspection; Micromechanical devices; Optical interferometry; Optimized production technology; Scanning electron microscopy; Testing;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031475
