Title :
Polarization device of CaCO/sub 3/ grating fabricated by anisotropic wet etching
Author :
Chang, J.Y. ; Chang, Y.C. ; Tien, H.T. ; Sun, C.C.
Author_Institution :
Inst. of Opt. Sci., Nat. Central Univ., Chung-li, Taiwan
Abstract :
A polarizer is made in a birefringent crystal, calcite, which is fabricated by anisotropic wet etching. The device is a v-groove grating with a period around 12 /spl mu/m. The etching patterns are discussed.
Keywords :
birefringence; calcium compounds; diffraction gratings; etching; micro-optics; optical fabrication; optical polarisers; 12 micron; CaCO/sub 3/; CaCO/sub 3/ grating; anisotropic wet etching; binary phase pattern; birefringent crystal; etching patterns; fabrication method; microoptics; polarization device; v-groove grating; Anisotropic magnetoresistance; Birefringence; Gratings; Microoptics; Optical diffraction; Optical polarization; Optical refraction; Optical sensors; Optical variables control; Wet etching;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031476
