DocumentCode :
2231962
Title :
Using extended BELST process in fabricating vertical comb actuator for optical application
Author :
Jerwei Hsieh ; Chien Cheng Chu ; Tsai, J.M.L. ; Weileun Fng
Author_Institution :
Micro Device Lab., Nat. Tsing Hua Univ., Hsinchu, Taiwan
fYear :
2002
fDate :
20-23 Aug. 2002
Firstpage :
133
Lastpage :
134
Abstract :
Angular motion plays a crucial role in optical applications such as switching and scanning. The angular motion is available using electrostatic actuation such as parallel plate, lateral comb, and vertical comb. Among them the vertical comb actuator (VCA) is regarded as the most promising approach to provide large angular motion. Recently, the High-Aspect-Ratio Micromachining (HARM) process has demonstrated its importance in offering even larger angular motion as well as extremely large stiffness microstructures. However, these approaches may suffer from alignment and bonding problems. An improved HARM process, the BELST (Boron Etch-stop assisted Lateral Silicon Etching), using a [111] silicon wafer is proposed in this study to fabricate a vertical comb drive actuator. Moreover, a large yet stiff mirror and a thin torsional spring are also available through this process within three masks. Thus the optical performance is improved and the driving voltage is reduced.
Keywords :
boron; electrostatic actuators; etching; micro-optics; micromachining; optical fabrication; silicon; MOEMS; Si:B; [111] Si wafer; angular motion; electrostatic actuation; extended BELST process; high-aspect-ratio micromachining; improved HARM process; optical applications; scanning; stiff mirror; switching; thin torsional spring; vertical comb actuator fabrication; Boron; Electrostatic actuators; Etching; Micromachining; Microstructure; Mirrors; Silicon; Springs; Voltage; Wafer bonding;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
Type :
conf
DOI :
10.1109/OMEMS.2002.1031479
Filename :
1031479
Link To Document :
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