Title :
Surface micromachining in magneto-optic waveguide with semiconductor guiding layer
Author :
Yokoi, H. ; Mizumoto, T. ; Sakai, T. ; Ohtsuka, T. ; Nakano, Y.
Author_Institution :
Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Japan
Abstract :
A magneto-optic waveguide with a semiconductor guiding layer was studied for an optical isolator employing a nonreciprocal phase shift. Surface micromachining was investigated for enhancement of the nonreciprocal phase shift in the magneto-optic waveguide.
Keywords :
magneto-optical isolators; micro-optics; micromachining; optical communication equipment; magneto-optic waveguide; nonreciprocal phase shift; optical communication systems; optical isolator; semiconductor guiding layer; surface micromachining; Arm; Electromagnetic waveguides; Indium phosphide; Isolators; Magnetooptic devices; Micromachining; Optical interferometry; Optical waveguides; Semiconductor waveguides; Surface waves;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031482
