Title :
SOI-fabrication of scanning mirror for laser display
Author :
Jin-Ho Lee ; Young-Chul Ko ; Byoung-So Choi ; Jong-Min Kim ; Duk Young Jeon
Author_Institution :
Mater. & Devices Lab., Samsung Adv. Inst. of Technol., Suwon, South Korea
Abstract :
A 1500 /spl mu/m/spl times/1200 /spl mu/m scanning mirror having vertical comb fingers has been fabricated by using silicon-on-insulator (SOI)-fabrication processes. It is a vertically driven electrostatic scanner and composed of two structures having vertical comb fingers. We used a buried oxide layer as an etch stop and acquired torsion bars with the uniform thickness. From this, the reliability of the scanning mirror is much improved.
Keywords :
microdisplays; micromirrors; optical projectors; optical scanners; silicon-on-insulator; 1200 micron; 1500 micron; SOI-fabrication; Si; buried oxide layer; etch stop; laser display; projection display; reliability; scanning mirror; torsion bars; vertical comb fingers; vertically driven electrostatic scanner; Bars; Displays; Dry etching; Electrodes; Fingers; Glass; Materials science and technology; Mirrors; Silicon; Wafer bonding;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031488
