DocumentCode
2232173
Title
2D optical scanner with magnetostrictive actuation for industrial applications
Author
Debray, A. ; Fujita, H. ; Ludwig, A. ; Quandt, E. ; Muro, H. ; Oki, T. ; Asaoka, A.
Author_Institution
LIMMS, University of Tokyo, Japan
fYear
2002
fDate
20-23 Aug. 2002
Firstpage
155
Lastpage
156
Abstract
MEMS technology has been widely used to realize optical scanners. However, the actuation principle has been so far limited to conventional principles and the size of the mirror limited below 1 mm/sup 2/. If magnetostriction is used for the actuation and the size of the mirror is tens of mm/sup 2/, this will allow for industrial applications. The work stresses the new scanner design for obtaining large deflection angles and higher structural strength.
Keywords
magnetostrictive devices; micro-optics; microactuators; optical scanners; 2D optical scanner; MEMS technology; actuation principle; deflection angles; industrial applications; magnetostriction; magnetostrictive actuation; structural strength; Coils; Magnetic anisotropy; Magnetic materials; Magnetic resonance; Magnetostriction; Mirrors; Optical materials; Perpendicular magnetic anisotropy; Resonant frequency; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location
Lugano, Switzerland
Print_ISBN
0-7803-7595-5
Type
conf
DOI
10.1109/OMEMS.2002.1031489
Filename
1031489
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