Title :
2D optical scanner with magnetostrictive actuation for industrial applications
Author :
Debray, A. ; Fujita, H. ; Ludwig, A. ; Quandt, E. ; Muro, H. ; Oki, T. ; Asaoka, A.
Author_Institution :
LIMMS, University of Tokyo, Japan
Abstract :
MEMS technology has been widely used to realize optical scanners. However, the actuation principle has been so far limited to conventional principles and the size of the mirror limited below 1 mm/sup 2/. If magnetostriction is used for the actuation and the size of the mirror is tens of mm/sup 2/, this will allow for industrial applications. The work stresses the new scanner design for obtaining large deflection angles and higher structural strength.
Keywords :
magnetostrictive devices; micro-optics; microactuators; optical scanners; 2D optical scanner; MEMS technology; actuation principle; deflection angles; industrial applications; magnetostriction; magnetostrictive actuation; structural strength; Coils; Magnetic anisotropy; Magnetic materials; Magnetic resonance; Magnetostriction; Mirrors; Optical materials; Perpendicular magnetic anisotropy; Resonant frequency; Silicon;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031489
