Title :
Statistical Optimization Of Aluminum Etch In The Ame 8330 Utilizing Total Productive Maintenance
Author :
Guy, Brian K. ; Herron, B.I.
Author_Institution :
Harris Semiconductor, Melbourne, FL
Keywords :
Aluminum; Corrosion; Etching; Fluid flow; Heat transfer; Nitrogen; Personnel; Plasma temperature; Resists; Temperature control;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682493
