Title :
Challenges in optical MEMS commercialization and MEMS foundry
Author_Institution :
Asia Pacific Microsystems Inc., Hsinchu, Taiwan
Abstract :
Optical MEMS has demonstrated numerous applications. To make relative commercialization activities can lead to good financial return, producing optical MEMS devices with reliable technology in an economic scale is a direction to business success. Foundry service may be an alternative to support optical MEMS community to realize their devices in such way.
Keywords :
micro-optics; MEMS foundry; optical MEMS commercialization; Commercialization; Foundries; Microelectromechanical devices; Micromechanical devices; Optical devices; Optical films; Optical sensors; Photonic integrated circuits; Production; Sensor arrays;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031490
