New MOEMS-switch device with electrostatic actuator

Author

Thielicke, E. ; Obermeier, E.

Author_Institution

Microsensor & Microactuator Technol. Center, Tech. Univ. of Berlin, Germany

fYear

2002

fDate

20-23 Aug. 2002

Firstpage

159

Lastpage

160

Abstract

This paper presents a new concept for a 1-by-N-switch, which can be used in tree-structured optical networks. Although the switch works with any large displacement actuator, a new curved electrode electrostatic actuator for linear motion of up to 180 /spl mu/m has been designed. No tilting mechanism is needed, and the mirror surface is smooth and easily coated with highly reflecting materials. A 1-by-4-switch has been fabricated using classical low cost micromechanical technologies like surface and bulk micromachining.

Keywords

electrostatic actuators; micro-optics; micromachining; microswitches; optical switches; 0 to 180 micron; 1-by-N-switch; MOEMS-switch device; Si; curved electrode electrostatic actuator; displacement actuator; electrostatic actuator; linear motion; micromachining; micromechanical technologies; mirror surface; tree-structured optical networks; Costs; Electrodes; Electrostatic actuators; Hydraulic actuators; Micromachining; Micromechanical devices; Mirrors; Optical fiber networks; Optical materials; Optical switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on

Conference_Location

Lugano, Switzerland

Print_ISBN

0-7803-7595-5

Type

conf

DOI

10.1109/OMEMS.2002.1031491

Filename

1031491