DocumentCode
2232268
Title
Monolithic MEMS optical switch with amplified out-of-plane angular motion
Author
Lopez, D. ; Simon, M.E. ; Pardo, F. ; Aksyuk, V. ; Klemens, F. ; Cirelli, R. ; Neilson, D.T. ; Shea, H. ; Sorsch, T. ; Ferry, E. ; Nalamasu, O. ; Gammel, P.L.
Author_Institution
Agere Syst., Murray Hill, NJ, USA
fYear
2002
fDate
20-23 Aug. 2002
Firstpage
165
Lastpage
166
Abstract
We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.
Keywords
electrostatic actuators; micromachining; micromirrors; optical arrays; optical fibres; optical switches; 60 V; amplified out-of-plane angular motion; electrostatic actuation; fiber-optic switching; mirror array; monolithic MEMS optical switch; surface micromachining; Electrodes; High speed optical techniques; Microelectromechanical devices; Micromechanical devices; Micromirrors; Mirrors; Optical attenuators; Optical devices; Optical switches; Wavelength division multiplexing;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location
Lugano, Switzerland
Print_ISBN
0-7803-7595-5
Type
conf
DOI
10.1109/OMEMS.2002.1031494
Filename
1031494
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