Title :
Monolithic MEMS optical switch with amplified out-of-plane angular motion
Author :
Lopez, D. ; Simon, M.E. ; Pardo, F. ; Aksyuk, V. ; Klemens, F. ; Cirelli, R. ; Neilson, D.T. ; Shea, H. ; Sorsch, T. ; Ferry, E. ; Nalamasu, O. ; Gammel, P.L.
Author_Institution :
Agere Syst., Murray Hill, NJ, USA
Abstract :
We describe an array of electrostatically actuated surface micromachined mirrors for fiber-optic switching. Using a pure flexure angle amplification mechanism the mirrors can be tilted continuously from 0 to 14 degrees with less than 60 V.
Keywords :
electrostatic actuators; micromachining; micromirrors; optical arrays; optical fibres; optical switches; 60 V; amplified out-of-plane angular motion; electrostatic actuation; fiber-optic switching; mirror array; monolithic MEMS optical switch; surface micromachining; Electrodes; High speed optical techniques; Microelectromechanical devices; Micromechanical devices; Micromirrors; Mirrors; Optical attenuators; Optical devices; Optical switches; Wavelength division multiplexing;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031494
