Title :
Record wavelength tuning of 127 nm for vertical cavity Fabry-Perot filter
Author :
Daleiden, J. ; Irmer, S. ; Rangelov, V. ; Romer, F. ; Tarraf, A. ; Prott, C. ; Strassner, M. ; Hillmer, H.
Author_Institution :
Inst. of Microstructure Technol. & Analytics, Kassel, Germany
Abstract :
Demonstrated micromechanically tunable Fabry-Perot filters with record electromechanical and optical performance. Wavelength tuning of 127nm applying only 7.3V is achieved. The stop-band of these filters is extremely wide (1250nm - 1800nm). These results open new application fields for micromechanically tunable filters, such as spectrometry for environmental and process analysis, medical diagnostics and colorimetry.
Keywords :
Fabry-Perot resonators; band-stop filters; micro-optics; optical communication equipment; optical fibre networks; optical filters; optical tuning; wavelength division multiplexing; 1250 to 1800 nm; 7.3 V; colorimetry; medical diagnostics; micromechanically tunable Fabry-Perot filters; process analysis; spectrometry; stop-band; vertical cavity Fabry-Perot filter; wavelength tuning; Air gaps; Biomembranes; Distributed Bragg reflectors; Fabry-Perot; Indium phosphide; Optical filters; Optical interferometry; Optical materials; Optical tuning; Suspensions;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031496
