• DocumentCode
    2232467
  • Title

    Varying-density hole-array grating fabrication for plasmonic waveguide sensors

  • Author

    Xu, M.Y.-C. ; Aitchison, J.S.

  • Author_Institution
    Edward S. Rogers Sr. Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada
  • fYear
    2011
  • fDate
    1-6 May 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Varying-density hole-array-embedded trapezoidal SPP waveguides are designed to halve the resonant spectral width and to reduce the EBL machine time by 20 fold. Experimental observations are shown.
  • Keywords
    diffraction gratings; electron beam lithography; optical fabrication; optical waveguides; plasmonics; spectral line breadth; EBL machine time; electron beam lithography; plasmonic waveguide sensors; resonant spectral width; varying-density hole-array grating fabrication; Arrayed waveguide gratings; Fabrication; Optical surface waves; Plasmons; Surface waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2011 Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-4577-1223-4
  • Type

    conf

  • Filename
    5950327
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2232467