Title :
Design and fabrication of surface-micromachined spherical mirrors
Author :
Max Ti-Kuang Hou ; Ke-Min Liao ; Hong-Zhen Yeh ; Pei-Yuan Hong ; Rongshun Chen
Author_Institution :
Dept. of Power Mech. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
A novel reflective surface-micromachined spherical mirror (SMSM), which can be used for focusing, collecting and imaging without chromatic aberration, and can be easily integrated into the micro optical bench, has been designed, fabricated and characterized.
Keywords :
aberrations; integrated optics; micromachining; micromirrors; optical focusing; optical testing; SMSM characterization; chromatic aberration; collecting applications; focusing applications; imaging applications; micro optical bench integration; microoptics; reflective micromirrors; surface-micromachined spherical mirrors; Fabrication; Integrated optics; Micromirrors; Microoptics; Mirrors; Optical design; Optical interferometry; Optical refraction; Optical sensors; Residual stresses;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031508
