Title :
Segmented deformable micro-mirror for free-space optical communication
Author :
Peter, Y.-A. ; Carr, E. ; Solgaard, O.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., CA, USA
Abstract :
In this paper, we describe a fabrication process for adaptive optics mirrors based on bonding of MEMS structures to electrode chips. This approach allows scaling to large mirror arrays for free-space communication. We demonstrate the process by fabricating pixelated 4 by 4 arrays of micro-mirrors with 1 /spl mu/m displacement at 200 V actuation voltage.
Keywords :
adaptive optics; deformation; electrodes; microassembling; micromachining; micromirrors; optical arrays; optical communication equipment; optical switches; 1 micron; 200 V; MEMS structure bonding; adaptive optics mirror fabrication process; electrode chips; free-space optical communication; large mirror array scaling; mirror actuation voltage; mirror displacement; pixelated micro-mirror arrays; segmented deformable micro-mirror; Actuators; Adaptive optics; Bonding; Electrodes; Etching; Fabrication; Gold; Micromechanical devices; Mirrors; Optical fiber communication;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031509
