Title :
A MEMS based optical fiber scanning probe
Author :
McCormick, D.T. ; Tien, N.C.
Author_Institution :
Dept. of Electr. & Comput. Eng., California Univ., Davis, CA, USA
Abstract :
A MEMS based optical scanning probe actuated utilizing bulk micromachined, electrostatic comb-drives has been realized. With a 12/spl mu/m fiber attached the probe is capable of scanning an angle of 5/spl deg/ at a frequency of 8kHz.
Keywords :
electrostatic actuators; micro-optics; optical fibres; optical scanners; probes; 12 micron; 8 kHz; MEMS; actuation voltages; angular scanning; bulk micromachined electrostatic comb-drives; electrostatically actuated devices; optical fiber scanning probe; scanning frequencies; Actuators; Biomedical optical imaging; High speed optical techniques; Micromechanical devices; Optical fiber devices; Optical fibers; Optical sensors; Probes; Resonant frequency; Voltage;
Conference_Titel :
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location :
Lugano, Switzerland
Print_ISBN :
0-7803-7595-5
DOI :
10.1109/OMEMS.2002.1031514
