Title :
The Significance and Detection of Transmissive Defects on 5X Retitles
Author :
Zurbrick, Larry S. ; Henke, Wolfgang
Author_Institution :
KLA Instruments Corporation, CA
Keywords :
Apertures; Automatic testing; Character generation; Computer aided manufacturing; Geometry; Inspection; Lenses; Printing; Resists; Solid modeling;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682495
