Title :
A surface acoustic wave gyro sensor
Author :
Kurosawa, Minoru ; Fukuda, Yoshimitsu ; Takasaki, Masaya ; Higuchi, Toshiro
Author_Institution :
Dept. of Precision Machinery Eng., Tokyo Univ., Japan
Abstract :
This paper explains a novel method to measure an angular velocity by using a surface acoustic wave device. Coriolis forces act on the particles vibrating in the standing wave of the surface acoustic wave, but cancel one another. Distributed cyclic perturbation masses on the surface realize detection of angular velocity. The secondary SAW, which has some coherence, can be built up in the orthogonal direction of the primary standing wave. This novel gyro sensor was planned based on this principle. The optimization of the electrode dimensions was carried out by equivalent circuit analysis. The SAW gyro sensor using the Rayleigh wave which could propagate on a 128° Y-cut LiNbO3 3-inch wafer with operating frequency of 15 MHz was designed
Keywords :
Coriolis force; Rayleigh waves; angular velocity measurement; equivalent circuits; gyroscopes; lithium compounds; surface acoustic wave sensors; 15 MHz; Coriolis forces; LiNbO3; Rayleigh wave; angular velocity measurement; distributed cyclic perturbation masses; electrode dimensions; equivalent circuit analysis; gyro sensor; operating frequency; orthogonal direction; standing wave; surface acoustic wave sensors; Acoustic measurements; Acoustic sensors; Acoustic signal detection; Acoustic waves; Angular velocity; Coherence; Electrodes; Surface acoustic wave devices; Surface acoustic waves; Velocity measurement;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635238
