Title :
Development of a modal analysis accelerometer based on a tunneling displacement transducer
Author :
Scheeper, Patrick R. ; Reynolds, J. Kurth ; Kenny, Thomas W.
Author_Institution :
Bruel & Kjaer, Naerum, Denmark
Abstract :
An accelerometer based on a tunneling displacement transducer is presented. The sensor is fabricated using silicon micromachining techniques for fabrication of the seismic mass, the suspension beams and the tunneling tip and electrodes. The demonstrated accelerometer shows linear response from 0.2 mg to 20 g (159 Hz), and shows a 1 kHz bandwidth. The electron tunneling accelerometer can be used in applications where both a high dynamic range and a reasonable bandwidth are required
Keywords :
accelerometers; elemental semiconductors; micromachining; microsensors; silicon; tunnelling; vibration measurement; 1 kHz; 159 Hz; Si; bandwidth; dynamic range; linear response; micromachining techniques; modal analysis accelerometer; seismic mass; suspension beams; tunneling displacement transducer; tunneling tip; vibration measurement; Accelerometers; Bandwidth; Electrodes; Electrons; Fabrication; Micromachining; Modal analysis; Silicon; Transducers; Tunneling;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635239
