A novel method for fabricating 2-D array piezoelectric micromachined ultrasonic transducers for medical imaging

Author

Fu, Di ; Ren, Tian-Ling ; Chen, Hao ; Yang, Yi ; Kong, Xiang-Ming ; Ren, Yuan ; Liao, W.-J. ; Liu, Li-Tian

Author_Institution

Tsinghua Nat. Lab. for Inf. Sci. & Technol., Tsinghua Univ., Beijing, China

fYear

2009

fDate

23-27 Aug. 2009

Firstpage

1

Lastpage

4

Abstract

Piezoelectric micromachined ultrasonic transducer (pMUT) is a new approach for the construction of 2-D arrays for real-time 3-D medical imaging. In this work, 6times6 pMUT arrays with element pitch down to 150 mum were successfully fabricated and characterized. The devices consist of 2 mum PZT film on a 3 mum Si/SiO2 supporting layer, and the multilayered membrane was released by a two-step process to ensure high elements density. The resonance frequency and dielectric properties were also investigated and the results show its potential for the application in 3-D imaging probes.

Keywords

biomedical ultrasonics; lead compounds; membranes; micromachining; piezoelectric transducers; silicon compounds; ultrasonic transducers; 2D array piezoelectric micromachined ultrasonic transducers; PZT; SiO₂; dielectric properties; multilayer membrane; realtime 3D medical imaging; resonance frequency; size 3 mum; Biomedical imaging; Biomembranes; Dielectrics; Piezoelectric films; Probes; Resonance; Resonant frequency; Semiconductor films; Ultrasonic transducer arrays; Ultrasonic transducers; PZT; ferroelectric thin film; medical imaging; piezoelectric micromachined ultrasonic transducer;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 2009. ISAF 2009. 18th IEEE International Symposium on the

Conference_Location

Xian

ISSN

1099-4734

Print_ISBN

978-1-4244-4970-5

Electronic_ISBN

1099-4734

Type

conf

DOI

10.1109/ISAF.2009.5307546

Filename

5307546