• DocumentCode
    2233385
  • Title

    Flexible, large-area metamaterials fabricated on thin silicon nitride membranes

  • Author

    Peralta, X.G. ; Arrington, C.L. ; Wanke, M.C. ; Brener, I. ; Williams, J.D. ; Smirnova, E. ; Taylor, A.J. ; O´Hara, J.F. ; Strikwerda, A. ; Averitt, R.D. ; Padilla, W.J.

  • Author_Institution
    Sandia Nat. Labs., Albuquerque, NM
  • fYear
    2008
  • fDate
    4-9 May 2008
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We present terahertz metamaterials fabricated on large-area, free-standing thin (les1 mum) silicon nitride membranes with the aim of reducing dielectric losses, enhancing metamaterial sensing capabilities, and enabling flexible and conformable designs.
  • Keywords
    dielectric losses; metamaterials; optical design techniques; optical fabrication; optical materials; silicon compounds; Si3N4; dielectric loss; terahertz metamaterial fabrication; thin silicon nitride membranes; Biomembranes; Dielectric loss measurement; Dielectric losses; Laboratories; Metamaterials; Optical resonators; Optical sensors; Physics; Resonance; Silicon; (160.3918) Metamaterials; (300.6170) Spectra; (310.6628) Subwavelength structures, nanostructures;
  • fLanguage
    English
  • Publisher
    iet
  • Conference_Titel
    Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    978-1-55752-859-9
  • Type

    conf

  • Filename
    4571342