DocumentCode
2233647
Title
A Monitor Wafer Based Controller For Pecvd Silicon Nitride Process On Amt 5000
Author
Mozumder, P.K. ; Saxena, Sharad ; Collins, Dave
Author_Institution
Texas Instruments
fYear
1993
fDate
18-19 Oct 1993
Firstpage
136
Lastpage
141
Keywords
Instruments; Monitoring; Plasma chemistry; Plasma measurements; Predictive models; Process control; Semiconductor device modeling; Sensor phenomena and characterization; Silicon; Size control;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
Type
conf
DOI
10.1109/ASMC.1993.682499
Filename
682499
Link To Document