Title :
A Monitor Wafer Based Controller For Pecvd Silicon Nitride Process On Amt 5000
Author :
Mozumder, P.K. ; Saxena, Sharad ; Collins, Dave
Author_Institution :
Texas Instruments
Keywords :
Instruments; Monitoring; Plasma chemistry; Plasma measurements; Predictive models; Process control; Semiconductor device modeling; Sensor phenomena and characterization; Silicon; Size control;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682499
