Title :
A new router for reducing “antenna effect” in ASIC design
Author :
Shirota, Hiroshi ; Sadakane, Toshiyuki ; Terai, Masayuki ; Okazaki, Kaoru
Author_Institution :
Mitsubishi Electr. Corp., Hyogo, Japan
Abstract :
In this paper, an efficient router for reducing “antenna effect” damage is reported. The antenna effect is a phenomenon of gate-oxide degradation by charge buildup on conductors in plasma-based manufacturing processes. It directly influences yield and reliability of VLSIs. The amount of the degradation is a direct function of interconnect geometry (e.g., amount of floating conductors connecting to the gate oxide during the processes). The proposed router combines a traditional router and a modification of wires for reducing the antenna effect damage using a rip-up and reroute method. It reduces the damage with only a small penalty of die size and performance. The effectiveness of the router, which is implemented in the layout system HGALOP, is demonstrated by experimental results on 3-4 level metal industrial sea-of-gates (SOG) circuits
Keywords :
application specific integrated circuits; circuit layout CAD; integrated circuit interconnections; integrated circuit layout; integrated circuit reliability; integrated circuit yield; logic CAD; logic arrays; network routing; ASIC design; HGALOP; antenna effect; charge buildup; gate-oxide degradation; industrial sea-of-gates circuits; interconnect geometry; plasma-based manufacturing processes; reliability; reroute method; rip-up method; router; yield; Application specific integrated circuits; Conductors; Degradation; Geometry; Integrated circuit interconnections; Joining processes; Manufacturing processes; Plasma materials processing; Very large scale integration; Wires;
Conference_Titel :
Custom Integrated Circuits Conference, 1998. Proceedings of the IEEE 1998
Conference_Location :
Santa Clara, CA
Print_ISBN :
0-7803-4292-5
DOI :
10.1109/CICC.1998.695049