Title :
Nanoscaled interdigitated electrode arrays for biochemical sensors
Author :
Van Gerwen, Peter ; Laureys, Wim ; Huyberechts, Guido ; De Baeck, M. ; Baert, Kris ; Suis, J. ; Varlan, Anca ; Sansen, Willy ; Hermans, Lou ; Mertens, Robert
Author_Institution :
IMEC, Leuven, Belgium
Abstract :
Nanoscaled interdigitated electrode arrays were made with Deep U.V. lithography. Electrode widths and spacings from 500 nm down to 250 nm were achieved on large active areas (0.5 mm×1 mm). These electrodes allow for the detection of affinity binding of biomolecular structures (e.g. antigens, DNA) by impedimetric measurements. Such a sensor is developed, theoretically analyzed, experimentally characterized, and is demonstrated as an affinity biosensor
Keywords :
DNA; arrays; biosensors; molecular biophysics; nanotechnology; photolithography; 500 to 250 nm; DNA; affinity biosensor; antigens; biochemical sensors; biomolecular structures; deep UV lithography; electrode spacing; electrode width; impedimetric measurements; large active area; nanoscaled interdigitated electrode arrays; Biosensors; DNA; Electric variables measurement; Electrodes; Impedance; Integral equations; Lithography; Probes; Sensor arrays; Sequences;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635249
