Title :
Miniaturized ISFET glucose sensor including a new structure actuation system
Author :
Kim, Chang-Soo ; Seo, Hwa-II ; Lee, Chae-Hyang ; Sohn, Byung-Ki
Author_Institution :
Sensor Technol. Res. Center, Kyungpook Nat. Univ., Taegu, South Korea
Abstract :
A new principle of an amperometric actuation technique was incorporated in the ISFET glucose sensor. The ISFET is fabricated by the CMOS process and the platinum working electrode is deposited by the lift-off process. A sensor with a specially designed ladder type working electrode exhibits improved operation in response time, response magnitude and detection range. An expectation concerning the reduction of sensor size is also discussed
Keywords :
biosensors; chemical sensors; ion sensitive field effect transistors; microactuators; microelectrodes; patient monitoring; CMOS process; ISFET glucose sensor; Pt; amperometric actuation technique; biosensors; detection range; ladder type working electrode; lift-off process; response magnitude; response time; sensor size; structure actuation system; working electrode; Amperometric sensors; Biosensors; Bridges; CMOS technology; Educational technology; Electrodes; Hydrogen; Platinum; Sensor systems; Sugar;
Conference_Titel :
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location :
Chicago, IL
Print_ISBN :
0-7803-3829-4
DOI :
10.1109/SENSOR.1997.635250
