Title :
Automatic Defect Classification Using Fuzzy Logic
Author :
Luria, M. ; Moran, Michael ; Yaffe, D.
Author_Institution :
ADE Corporation - Newton Massachusetts
Keywords :
Costs; Decision making; Expert systems; Fabrication; Feature extraction; Fuzzy logic; Human factors; Image processing; Laboratories; System testing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682510
