• DocumentCode
    2236425
  • Title

    Automatic Defect Classification Using Fuzzy Logic

  • Author

    Luria, M. ; Moran, Michael ; Yaffe, D.

  • Author_Institution
    ADE Corporation - Newton Massachusetts
  • fYear
    1993
  • fDate
    18-19 Oct 1993
  • Firstpage
    191
  • Lastpage
    193
  • Keywords
    Costs; Decision making; Expert systems; Fabrication; Feature extraction; Fuzzy logic; Human factors; Image processing; Laboratories; System testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
  • Type

    conf

  • DOI
    10.1109/ASMC.1993.682510
  • Filename
    682510
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2236425