High-speed positioning of a linear stage using feedback error learning control: Improvement of learning time and accuracy

This paper considers high-speed position control of a stage. To improve the performance of positioning, feedback error learning (FEL) control is utilized. In the proposed FEL, free parameters of a feedforward controller are determined such that true value of estimated parameters can become small. Moreover, a priori information on the stage is utilized for learning. Effects of parameters of FEL are investigated in order to improve learning time and accuracy. Experimental results demonstrate that the stage positioning based on the proposed FEL reduces settling time and improves repeatability.