A MEMS electrospray nozzle for mass spectroscopy

Author

Desai, Amish ; Tai, Yu-Chong ; Davis, Michael T. ; Lee, Terry D.

Author_Institution

Dept. of Electr. Eng., California Inst. of Technol., Pasadena, CA, USA

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

927

Abstract

We present our development of a micron-sized MEMS electrospray nozzle and demonstrate its application for electrospray mass spectroscopy (MS). The fabricated and tested micromachined electrospray nozzles are typically 40 μm long and with 1-3 μm orifice diameters. They also have built-in particle filters. This micromachined nozzle has been successfully interfaced with a mass spectrometer (Finnigan Mat LCQ Ion Trap) to perform standard characterization using a solution of gramicidin S at a flow rate of 50 nL/min and a voltage potential of 4 kV. This MEMS nozzle has demonstrated valid MS analyses with lower flow rates, and it has many advantages over the traditional complex preparation of a glass-capillary

Keywords

biological techniques; fluidic devices; mass spectrometer accessories; mass spectroscopic chemical analysis; micromachining; micromechanical devices; nozzles; sprays; 1 to 3 mum; 4 kV; 40 mum; Finnigan Mat LCQ Ion Trap; MEMS electrospray nozzle; flow rate; flow rates; gramicidin S; mass spectrometer; mass spectroscopy; micromachined electrospray nozzles; micron-sized MEMS electrospray nozzle; orifice diameters; particle filters; voltage potential; Bridge circuits; Chemical analysis; Chemical technology; Ionization; Mass spectroscopy; Micromechanical devices; Orifices; Particle filters; System-on-a-chip; Ultrafast optics;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635254

Filename

635254