Title :
Isolating the Killer Defect: Process Analysis using Particle Map to Probe Map Correlation
Author :
Carman, Eric ; Lawrence, Chris ; Nair, Raj ; Sanchez, Gerald
Author_Institution :
Motorola, Inc Logic and Analog Technology Group, MD
Keywords :
Application specific integrated circuits; Etching; Failure analysis; Isolation technology; Light scattering; Logic; Particle measurements; Particle scattering; Probes; Semiconductor device modeling;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682512
