Title :
Enhanced light extraction of light-emitting diodes with photonic crystal pattern fabricated by nanoimprint
Author :
Byeon, Kyeong-Jae ; Hwang, Seon-Yong ; Yang, Ki-Yeon ; Lee, Heon ; Hong, Chang-Hee ; Suh, Eun-Kyung
Author_Institution :
Dept. of Mater. Sci. & Eng., Korea Univ., Seoul
Abstract :
A hexagonal array of sub-micron sized holes was fabricated on InGaN/GaN quantum-well light-emitting diodes using nanoimprint lithography. Photoluminescence measurement confirms that light extraction of the LED was enhanced with two-dimensional photonic crystal patterns.
Keywords :
III-V semiconductors; gallium compounds; indium compounds; light emitting diodes; nanolithography; photoluminescence; photonic crystals; 2D photonic crystal patterns; InGaN-GaN; light emitting diodes; light extraction; nanoimprint lithography; photoluminescence; semiconductor quantum wells; sub-micron sized holes; Etching; Gallium nitride; Light emitting diodes; Materials science and technology; Nanolithography; Photonic crystals; Plasma applications; Plasma measurements; Scanning electron microscopy; Substrates; (230.0230) Optical devices; (230.3670) Light-emitting diodes;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
