• DocumentCode
    2237367
  • Title

    A novel mechano-optical sensor based on read-out with a Si3N4 grated waveguide

  • Author

    Pham, S.V. ; Dijkstra, M. ; van Wolferen, H.A.G.M. ; Pollnau, M. ; Krijnen, G.J.M. ; Hoekstra, H.J.W.M.

  • Author_Institution
    Integrated Opt. Microsyst. (IOMS) Group, Univ. of Twente, Enschede, Netherlands
  • fYear
    2011
  • fDate
    1-6 May 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A proof-of-concept study is reported on fabrication and characterization of a novel and compact integrated mechano-optical sensor based-on a micro-bridge suspended above a Si3N4 grated waveguide.
  • Keywords
    integrated optics; micro-optics; microsensors; optical sensors; optical waveguides; Si3N4; grated waveguide; integrated mechano-optical sensor; microbridge; Absorption; Integrated optics; Optical device fabrication; Optical interferometry; Optical sensors; Optical surface waves; Optical waveguides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2011 Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-4577-1223-4
  • Type

    conf

  • Filename
    5950509
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2237367