Title :
Advanced SIL System with High NA and Large Tolerance
Author :
Won, Kitak ; Choi, Narak ; Lee, Jiyeon ; Shin, Yunsup ; Lee, Kyungeon ; Milster, Tom D. ; Lee, Jaihyung ; Kim, Jaisoon
Author_Institution :
Sch. of Phys. & Astron., Seoul Nat. Univ., Kwanak-gu
Abstract :
To achieve high NA and large tolerance, we designed a new SIL system (optimum SIL) which combines each advantages of the hyper SIL and the hemi SIL system. Also using micro-SIL system we can improve its performance. There are simulation results which support our works.
Keywords :
lenses; optical design techniques; hemi SIL system; hyper SIL system; numerical aperture; optical design; solid immersion lens; Lenses; Memory; Optical design; Optical refraction; Optical sensors; Optical variables control; Optimized production technology; Refractive index; Solids; Stability;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391108
