Title :
An Evaluation of Surface Finish and Flush-Up Procedures for High Purity HCI Gas Distribution Systems
Author :
Duguid, Rebecca ; Coder, Skip ; Binder, Robin ; Hertzler, B.
Author_Institution :
Millipore Corporation, Bedford, MA
Keywords :
Contamination; Corrosion; Gases; Human computer interaction; Impurities; Infrared spectra; Moisture; Purification; Steel; Surface finishing;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682514
