Title :
Nanoscale oxidation of silicon microring resonators
Author :
Shen, Yiran ; Mookherjea, Shayan
Author_Institution :
Univ. of California, San Diego, La Jolla, CA, USA
Abstract :
The resonance frequency of a silicon microring was permanently blue-shifted with 1.2 GHz resolution over more than 350 GHz, a full free-spectral-range, by electrochemically changing the waveguide core (silicon) to the cladding (silicon dioxide) material.
Keywords :
claddings; electrochemistry; micro-optics; micromechanical resonators; optical resonators; optical waveguides; oxidation; resonance; spectral line shift; Si; SiO2; blue shift; cladding material; microring resonators; nanoscale oxidation; resonance frequency; waveguide core; Fabrication; Nanoscale devices; Optical resonators; Optical waveguides; Oxidation; Resonant frequency; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
