• DocumentCode
    2238660
  • Title

    Nanoscale oxidation of silicon microring resonators

  • Author

    Shen, Yiran ; Mookherjea, Shayan

  • Author_Institution
    Univ. of California, San Diego, La Jolla, CA, USA
  • fYear
    2011
  • fDate
    1-6 May 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The resonance frequency of a silicon microring was permanently blue-shifted with 1.2 GHz resolution over more than 350 GHz, a full free-spectral-range, by electrochemically changing the waveguide core (silicon) to the cladding (silicon dioxide) material.
  • Keywords
    claddings; electrochemistry; micro-optics; micromechanical resonators; optical resonators; optical waveguides; oxidation; resonance; spectral line shift; Si; SiO2; blue shift; cladding material; microring resonators; nanoscale oxidation; resonance frequency; waveguide core; Fabrication; Nanoscale devices; Optical resonators; Optical waveguides; Oxidation; Resonant frequency; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2011 Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-4577-1223-4
  • Type

    conf

  • Filename
    5950559
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2238660