Title :
Characterization of polymer microtoroid resonators fabricated by two-photon stereolithography process
Author :
Chang, Jee Soo ; Lee, Seung Hoon ; Son, Yong ; Prem, Prabhakaran ; Lee, Kwang-Sup ; Park, Namkyoo ; Yang, Dong-Yol ; Min, Bumki
Author_Institution :
Dept. of Mech. Eng., Korea Adv. Inst. of Sci. & Technol. (KAIST), Daejeon, South Korea
Abstract :
We report on the fabrication and characterization of high-Q microtoroid resonators made of low loss modified polymers by the two-photon stereolithography process. We found that polymer resonators can be fabricated in a high-speed process, and measurements showed a maximum Q factor of 2.8×105.
Keywords :
Q-factor; micro-optomechanical devices; micromechanical resonators; optical fabrication; optical losses; optical polymers; optical resonators; stereolithography; two-photon processes; Q-factor; high-Q microtoroid resonators; high-speed process; low-loss modified polymers; polymer microtoroid resonator fabrication; two-photon stereolithography process; Fabrication; Laser beams; Optical resonators; Polymers; Q factor;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
