Optimization of Cost Versus Performance of Gas Distribution Systems through Contamination Modelling

Author

Noel, P. Espitalier ; Chigirinskiy, M. ; Athalye, A. ; Siefering, K. ; Whitlock, W.

Author_Institution

Airco - The BOC Group, Inc., Murray Hill, NJ

fYear

1993

fDate

18-19 Oct 1993

Firstpage

232

Lastpage

236

Keywords

Contamination; Cost function; Databases; Equations; Moisture; Packaging; Polymers; Predictive models; Systems engineering and theory; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI

Type

DOI

10.1109/ASMC.1993.682520

Filename

682520

Link To Document