Title :
Optimization of Cost Versus Performance of Gas Distribution Systems through Contamination Modelling
Author :
Noel, P. Espitalier ; Chigirinskiy, M. ; Athalye, A. ; Siefering, K. ; Whitlock, W.
Author_Institution :
Airco - The BOC Group, Inc., Murray Hill, NJ
Keywords :
Contamination; Cost function; Databases; Equations; Moisture; Packaging; Polymers; Predictive models; Systems engineering and theory; Valves;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
DOI :
10.1109/ASMC.1993.682520
