Title :
Femtosecond laser-assisted etching of three dimensional woodpile micro-channel arrays in fused silica
Author :
Ho, Stephen ; Haque, Moez ; Herman, Peter Robert ; Aitchison, James Stewart
Author_Institution :
Edward S. Rogers Sr. Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada
Abstract :
A three-dimensional inverted-woodpile micro-channel array was fabricated in bulk fused silica with femtosecond laser and HF etching. An exposure compensation algorithm provided uniform periodic woodpile structure defining a novel micro-channel.
Keywords :
etching; high-speed optical techniques; laser materials processing; optical fabrication; silicon compounds; 3D inverted woodpile microchannel arrays; HF etching; bulk fused silica; exposure compensation; femtosecond laser-assisted etching; uniform periodic woodpile structure; Chemical lasers; Etching; Laser theory; Optimized production technology; Photonic crystals; Silicon compounds; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
