• DocumentCode
    2238974
  • Title

    Femtosecond laser-assisted etching of three dimensional woodpile micro-channel arrays in fused silica

  • Author

    Ho, Stephen ; Haque, Moez ; Herman, Peter Robert ; Aitchison, James Stewart

  • Author_Institution
    Edward S. Rogers Sr. Dept. of Electr. & Comput. Eng., Univ. of Toronto, Toronto, ON, Canada
  • fYear
    2011
  • fDate
    1-6 May 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    A three-dimensional inverted-woodpile micro-channel array was fabricated in bulk fused silica with femtosecond laser and HF etching. An exposure compensation algorithm provided uniform periodic woodpile structure defining a novel micro-channel.
  • Keywords
    etching; high-speed optical techniques; laser materials processing; optical fabrication; silicon compounds; 3D inverted woodpile microchannel arrays; HF etching; bulk fused silica; exposure compensation; femtosecond laser-assisted etching; uniform periodic woodpile structure; Chemical lasers; Etching; Laser theory; Optimized production technology; Photonic crystals; Silicon compounds; Ultrafast optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2011 Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-4577-1223-4
  • Type

    conf

  • Filename
    5950572
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2238974