Title :
Digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities by atomic layer deposition
Author :
Chen, Charlton J. ; Yang, Xiaodong ; Husko, Chad A. ; Wong, Chee Wei
Author_Institution :
Opt. Nanostruct. Lab., Columbia Univ., New York, NY
Abstract :
We propose and demonstrate the digital resonance tuning of high-Q/Vm silicon photonic crystal nanocavities using self-limiting atomic layer deposition. Control of resonances of 122 plusmn 18 pm per hafnium oxide atomic layer is achieved.
Keywords :
atomic layer deposition; hafnium compounds; microcavities; photonic crystals; HfO2; digital resonance tuning; resonance control; self-limiting atomic layer deposition; silicon photonic crystal nanocavity; Atom optics; Atomic layer deposition; Hafnium oxide; Optical bistability; Optical resonators; Photonic crystals; Resonance; Silicon; Tuning; Virtual manufacturing; (230.5298) Photonic crystals; (230.5750) Resonators; (350.4238) Nanophotonics and photonic crystals;
Conference_Titel :
Lasers and Electro-Optics, 2008 and 2008 Conference on Quantum Electronics and Laser Science. CLEO/QELS 2008. Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-859-9
