DocumentCode
2239851
Title
Commercialization of silicon-based gas sensors
Author
Lyle, Robert P. ; Walters, Dean
Author_Institution
Motorola Inc., Phoenix, AZ, USA
Volume
2
fYear
1997
fDate
16-19 Jun 1997
Firstpage
975
Abstract
Large scale production capability of silicon based tin oxide gas sensors has been established. It is well known that metal oxide gas sensors are sensitive to both ambient temperature and relative humidity. Humidity compensation is accomplished through use of a specific sequential mode of operation. Device sensitivity from zero to 400 ppm CO over the range of 20% to 80% relative humidity is presented
Keywords
elemental semiconductors; gas sensors; humidity; semiconductor device manufacture; semiconductor materials; silicon; tin compounds; CO; Si-SnO2; Si-based gas sensors; ambient temperature; commercialization; humidity compensation; large scale production capability; metal oxide gas sensors; polysilicon layer; relative humidity; specific sequential operation mode; tin oxide gas sensors; Commercialization; Gas detectors; Gases; Humidity; Packaging; Production; Resistors; Silicon; Temperature sensors; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.635266
Filename
635266
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