Title :
Sub-30nm spatial resolution imaging using a tabletop 13nm high harmonic source
Author :
Seaberg, Matthew D. ; Adams, Daniel E. ; Schlotter, William F. ; Liu, Yanwei ; Menoni, Carmen ; Murnane, Margaret ; Kapteyn, Henry
Author_Institution :
Dept. of Phys. & JILA, Univ. of Colorado & NIST, Boulder, CO, USA
Abstract :
We report the highest spatial resolution (<;30nm) imaging to-date using a tabletop x-ray microscope in any imaging modality. High-harmonic light at 13nm illuminates an object, with images retrieved by iterative phase retrieval of the scatter pattern.
Keywords :
X-ray microscopy; image resolution; imaging modality; iterative phase retrieval; scatter pattern; size 13 nm; spatial resolution imaging; tabletop X-ray microscope; tabletop high harmonic source; Laser beams; Microscopy; Spatial resolution; X-ray imaging; X-ray lasers;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2011 Conference on
Conference_Location :
Baltimore, MD
Print_ISBN :
978-1-4577-1223-4
