Title :
Study of Diamond Synthesis by Inductively Coupled Plasma with Inside RF Antenna and CO2 Laser
Author :
Nakagaki, Keita ; Yamauchi, Toshihiko ; Kanno, Yoshinori ; Kobayashi, Seiji
Author_Institution :
Interdiscipl. Grad. Sch. of Med. & Eng., Yamanashi Univ., Yamanashi
Abstract :
The CVD system by 27.12 MHz ICP discharge and CO2 laser was developed to investigate the advanced ceramics, particularly diamond grain or film. Our system is unique, whose RF antenna coil was installed inside of chamber. In our experiment, it was measured that the plasma characteristics which were Te=3.0 eV and ne=8.2times109 cm-3. Any impurity was not observed in the present condition, judging from the spectroscopic measurement. We concluded that the diamond nuclei or ball-like diamond on the silicon (Si) plate by the low power RF heating was synthesized.
Keywords :
ceramics; diamond; plasma materials processing; C; RF antenna coil; diamond nuclei; diamond synthesis; inductively coupled plasma; low power RF heating; plasma characteristics; Antenna measurements; Ceramics; Coils; Heating; Impurities; Plasma measurements; Plasma properties; Radio frequency; Silicon; Spectroscopy;
Conference_Titel :
Lasers and Electro-Optics - Pacific Rim, 2007. CLEO/Pacific Rim 2007. Conference on
Conference_Location :
Seoul
Print_ISBN :
978-1-4244-1173-3
Electronic_ISBN :
978-1-4244-1174-0
DOI :
10.1109/CLEOPR.2007.4391266