Study of Diamond Synthesis by Inductively Coupled Plasma with Inside RF Antenna and CO2 Laser

The CVD system by 27.12 MHz ICP discharge and CO₂ laser was developed to investigate the advanced ceramics, particularly diamond grain or film. Our system is unique, whose RF antenna coil was installed inside of chamber. In our experiment, it was measured that the plasma characteristics which were T_e=3.0 eV and n_e=8.2times10⁹ cm^-3. Any impurity was not observed in the present condition, judging from the spectroscopic measurement. We concluded that the diamond nuclei or ball-like diamond on the silicon (Si) plate by the low power RF heating was synthesized.